Product Title: Concepts of Silicon Surface Micromachining DVD
Updated from Personify: 2014-11-10
Personify Product Code: DV03PUB109
Personify Product ID: 118443
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Published By: SME
Published Date: 2003-07-01
Page Count: 0
Dr. Bernhard Jokiel, Jr. - Senior Member of Technical Staff, Sandia National Laboratories, provides this introduction to silicon surface micromachining (SSM) as a method for creating micro-electrical mechanical (MEMS) devices.
Viewers will be introduced to the basics of processing SSM devices using Sandia National Laboratory's SUMMiT-V (TM) process including design tools and methodology. Real-world applications for MEMS devices will be presented including on-chip spatial motion control as well as an overview of other commercialized MEMS products and technologies. The viewer will walk away with a clearer view of MEMS technology and a raised awareness of the convergence of macro, meso, micro, and nano fabrication technologies. Several video clips and animations show how these devices create and control motions.
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Video Length: 43 minutes