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Product Title: Extending Electrical Resistivity Measurements in Micro-Scratching...

Updated from Personify: 2013-08-12

Personify Product Code: TP04PUB227

Personify Product ID:       127177

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Author: Hisham A Abdel-Aal

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Published Date: 2004-07-27

Page Count: 15

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Product Type:   TECHPAPER

 

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This paper describes a procedure by which the average thermal conductivity of the metallic phase of silicon is extracted from electrical resistivity measurements. The procedure is based on teaming a temperature evaluation code to the resistivity measurements thus allowing the extraction of the conductivity as a function of temperature. The results indicate that despite the relatively high thermal conductivity of covalent silicon, the metallic phase is rather insulative. This affects the dynamics of ductile-regime-machining and the diamond turning of semiconductors in general and silicon in particular. Author: Hisham A. Abdel-Aal, University of Wisconsin, Platteville, WI.

 

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